NTC Wafer In Situ Wired Wafer Temperature Measurement
)
NTC Wafer In Situ Wired Wafer Temperature Me asurement system provides high-precision and reliable wafer temperature measurement and monitoring methods to improve process equipment performance, quality and yield.
Specifications
|
Name |
Specifications |
|
Nominal resistance |
10kΩ,5KΩ@25℃ |
|
Temperature range (℃) |
0-100℃ |
|
Measurement accuracy (mK) |
Able to reach ±0.01℃，±0.001℃ |
|
Repetition accuracy（mK） |
Able to reach ＜0.01℃，＜0.002℃ |
|
Wire |
4-wire |
|
Wafer size |
4, 6, 8, and 12 inches |
|
Number of temperature measurement points (pieces) |
Selectable |
|
Point distribution |
Average distribution or according to user requirements |
|
Thickness (mm) |
0.725 |
|
Vacuum feedthrough |
Polyimide flat cable, atmospheric to 10-7 Torr capable, length designated by customer. |
|
Lead length L1 |
2、3、5、10（m), can be customized |
|
Lead terminal |
DB or aviation plug |
|
Calibration |
Provide ZHICE-ELEC self calibration certificate |
Temperature acquisition Software
ZCDAQ TEMP accurately collects and analyzes temperature data of wafers, and can provide multi-point temperature measurement. The software visualizes temperature distribution and changes with charts and provides hardware and software embedded solutions.
High Precision Temperature Modules
Specifications
|
Name |
Specifications |
|
Temperature range (℃) |
0-100℃ |
|
Measurement accuracy (mK) |
Can reach ±0.01℃，±0.001℃ |
|
Repetition accuracy (mK) |
Can reach ＜0.01℃，＜0.002℃ |
|
Measurement resolution (mK) |
0.001℃，0.0001℃ |
|
Number of measurement channels (pieces) |
8, 18, 32, 48, etc. selectable |
|
Sampling frequency |
1Hz |
|
Excitation current (uA) |
≤10 |
|
Operation/fault indicator light |
Yes |
|
Single channel independent control |
Yes |
|
Input |
4-wire 10K Ω thermistor |
|
Communication interface |
LAN/RS485/USB |
|
Communication protocol |
Modbus RTU |
|
Temperature probe interface |
DB or aviation plug |
|
Temperature collection and recording software |
ZCDAQ Wafer， Collect, record, analyze, and heat map |
|
Power supply |
AC220V/50Hz |
Please Read On, Stay Posted, Subscribe, And We Welcome You To Tell Us What You Think.
Copyright @ 2025 Hefei Zhice Electronics Co., Ltd.. All Rights Reserved. Sitemap / Blog / XML / Privacy Policy
Network Supported
